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JEOL JXA-8530F Hyperprobe
The JXA-8530F utilizes a field emission (FE) electron gun that makes it possible to perform elemental analyses of solid surfaces down to ultra-micro-areas (40 nm) at a probe current of only 10 nA. The JXA-8530F also offers an improved electron optical and evacuation systems to take advantage of the FE gun. These improvements, over conventional filament electron sources, generate a smaller probe diameter at lower accelerating voltages allowing the JXA-8530F to make quantitative analyses at much higher resolution than any other microprobe. The analytical and imaging specifications of the JXA-8500F are shown in the table below. Please contact us with any questions regarding sample analysis.
JEOL JXA-8530F Specifications
| Specification |
Range |
| Detectable Element Range |
Be to U |
| Detectable Wavelength Range |
0.087 to 11.4 nm |
| Number of X-ray spectrometers |
1-5 (Plus EDS) |
| Specimen size |
100 mm x 100 mm x 5 mm |
| X-Y range |
90 mm x 90 mm |
| Accelerating Voltage |
30 kV (0.1 kV steps) |
| Probe Current Range |
10 pA - 500 nA |
| Min. Probe Size |
400 nm@10 kV, 10 nA
100 nm@10 kV, 100 nA |
| Scanning Magnification |
x40 - x300,000 |

JEOL JSM-6510 Low Vacuum SEM
The JSM-6510LV is a variable pressure Scanning Electron Microscope (SEM) that can handle samples up to 150 mm in diameter. This SEM can operate in a low vacuum mode to accomodate samples with a non-conductive surface and/or excessive water content. With a high resolution of 3.0nm at 30kV, the JSM-6510LV delivers amazing clarity of the finest structures. In addition to routine imaging at several hundreds of times greater resolution than the optical microscope, and with a focal depth several tens of times greater than the optical microscope, the SEM allows for detailed measurements, including 3D measurement from stereo images. Dual live image display of the secondary electron image and a backscattered composition image allow the user to contrast and compare specific details. The analytical and imaging specifications of the JSM-6510LV are shown in the table below. Please contact us with any questions regarding sample analysis.
JEOL JSM-6510LV Specifications
Specification |
Range |
| Resolution |
High Vacuum mode: 3.0 nm (30kV)
Low Vacuum mode: 4.0 nm (30kV) |
| Accelerating voltage |
0.5 to 30 kV |
| Magnification |
x5 to 300,000 (printed as a 128mm x 96mm micrograph) |
| Filament |
Pre-centered W hairpin filament (with continuous auto bias) |
| Objective lens |
Super conical lens |
| Objective lens apertures |
Three position, controllable in X/Y directions |
Maximum specimen size: |
| LGS Type stage |
125mm dia. full coverage (152.4mm dia. loadable) |
Specimen stage: |
| LGS Type stage |
Eucentric goniometer
X=80mm, Y=40mm, Z=5mm-48mm
R=360° (endless)
Tilt -10/+90° |

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